Concepedia
Statistics
Publications
2
Citations
32
H-Index
Active since
2000
Affiliations
Nagoya University(Current)
Canon Anelva (Japan)
Yuko Mizutani is an author at Nagoya University specializing in silicon thin films, thin films, and silicon.
Publications per year
2000–2001
Plasma diagnostics and low-temperature deposition of microcrystalline silicon films in ultrahigh-frequency silane plasma
Shigeaki Sumiya, Yuko Mizutani, Ryohei Yoshida et al. · Journal of Applied Physics · 2000 · 19 citations
Natural Sciences, Materials Science, Physics +17
Growth of Preferentially Oriented Microcrystalline Silicon Film Using Pulse-Modulated Ultrahigh-Frequency Plasma
Kazuya Murata Kazuya Murata, Yuko Mizutani, Emi Iwasaka Emi Iwasaka et al. · Japanese Journal of Applied Physics · 2001 · 13 citations
Natural Sciences, Materials Science, Physics +16
1–2 of 2