Concepedia

Ichiro Yokoyama

IY

3

Publications

57

Citations

3

H-Index

2002

Active since

Affiliations

KLA (United States)(Current)

Ichiro Yokoyama is an author at KLA (United States) specializing in engineering, computer architecture, and computer engineering.

Top concepts

Publications per year

2002–2007

3

Publications

3

Thermal Behavior of Large-Diameter Silicon Wafers during High-Temperature Rapid Thermal Processing in Single Wafer Furnace

Woo Sik Yoo, Takashi Fukada, Ichiro Yokoyama et al. · Japanese Journal of Applied Physics · 2002 · 30 citations

, , +22

EPICS DEVICE/DRIVER SUPPORT MODULES FOR NETWORK-BASED INTELLIGENT CONTROLLERS

J. Odagiri, J. Chiba, K. Furukawa et al. · 2003 · 17 citations

, , +19

Field results from a new die-to-database reticle inspection platform

W. H. Broadbent, Ichiro Yokoyama, Paul K. L. Yu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 10 citations

, , +16

Rows per page

1–3 of 3