3
Publications
65
Citations
3
H-Index
1995
Active since
Affiliations
Y. Zaitsu is an author at ShinEtsu Chemical (Japan) specializing in thin films, materials science, and applied physics.
Top concepts
Thin FilmsEngineeringApplied PhysicsMaterial SciencePhysicsNanoelectronicsSurface ScienceMicroelectronicsCrystalline DefectsMaterials Engineering
Publications per year
1995–2021
3
3
Rows per page
1–3 of 3