Concepedia

Amr Y. Abdo

AY

Statistics

Publications

4

Citations

48

H-Index

4

Active since

1999

Affiliations

MIT Lincoln Laboratory(Current)

University of Wisconsin–Madison

K Lab (United States)

Amr Y. Abdo is an author at MIT Lincoln Laboratory specializing in engineering, calibration, and computer engineering.

Top concepts

EngineeringCalibrationComputer EngineeringModeling And SimulationDesignPhysicsEducationMetrologyPhotonicsStatistics

Publications per year

1999–2010

4

Publications

4

The feasibility of using image parameters for test pattern selection during OPC model calibration

Amr Y. Abdo, Ramya Viswanathan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 14 citations

Engineering, Measurement, Optical Testing +16

Automation of sample plan creation for process model calibration

James Oberschmidt, Amr Y. Abdo, Tamer Desouky et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 13 citations

Engineering, Resist Model Calibration, 3D Modeling +22

Preliminary microfluidic simulations for immersion lithography

Alexander C. Wei, Gregory Nellis, Amr Y. Abdo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 11 citations

Thermomechanical distortions of advanced optical reticles during exposure

Jaehyuk Chang, Amr Y. Abdo, Byungkyu Kim et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 10 citations

Optical Materials, Engineering, Electron-beam Lithography +17

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