Concepedia

C. Turco

CT

Statistics

Publications

4

Citations

78

H-Index

4

Active since

1998

Affiliations

STMicroelectronics (Switzerland)(Current)

STMicroelectronics (Italy)

C. Turco is an author at STMicroelectronics (Switzerland) specializing in integrated circuit design, manufacturing engineering, and engineering.

Publications per year

1998–2008

4

Publications

4

Nanopatterning of organic and inorganic materials by holographic lithography and plasma etching

Paolo Visconti, C. Turco, R. Rinaldi et al. · Microelectronic Engineering · 2000 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +16

Holographic nanopatterning of the organic semiconductor poly(<i>p</i>-phenylene vinylene)

Giuseppe Gigli, R. Rinaldi, C. Turco et al. · Applied Physics Letters · 1998 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

Sub-k1 = 0.25 lithography with double patterning technique for 45-nm technology node flash memory devices at λ = 193nm

Gianfranco Capetti, Pietro Cantù, Elisa Galassini et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 18 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Double patterning overlay and CD budget for 32 nm technology node

Umberto Iessi, Sara Loi, A. Salerno et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

Engineering, Manufacturing Engineering, Biomedical Imaging +10

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