D. A. Choutov

Low energy electron-enhanced etching of Si(100) in hydrogen/helium direct-current plasma

H. P. Gillis, D. A. Choutov, Peter Steiner et al. · Applied Physics Letters · 1995 · 36 citations

Natural Sciences, Materials Engineering, Materials Science +16

Formation of ordered nanocluster arrays by self-assembly on nanopatterned Si(100) surfaces

Thomas A. Winningham, H. P. Gillis, D. A. Choutov et al. · Surface Science · 1998 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +12

Highly anisotropic, ultra-smooth patterning of GaN/SiC by low energy electron enhanced etching in DC plasma

H. P. Gillis, D. A. Choutov, Kevin P. Martin et al. · Journal of Electronic Materials · 1997 · 28 citations

Engineering, Materials Engineering, Materials Science +17

Low Energy Electron‐Enhanced Etching of GaN/Si in Hydrogen Direct Current Plasma

H. P. Gillis, D. A. Choutov, K. P. Martin et al. · Journal of The Electrochemical Society · 1996 · 28 citations

Engineering, Materials Engineering, Materials Science +17

Low energy electron-enhanced etching of GaAs(100) in a chlorine/hydrogen dc plasma

H. P. Gillis, D. A. Choutov, K. P. Martin et al. · Applied Physics Letters · 1996 · 27 citations

Engineering, Materials Engineering, Materials Science +15