Mihai Scarlete

Structural and mechanical properties of amorphous silicon carbonitride films prepared by vapor-transport chemical vapor deposition

Y. Awad, My Alı El Khakani, Ç. Aktik et al. · Surface and Coatings Technology · 2009 · 50 citations

Materials Science, Materials Engineering, Engineering +8

Structural analysis of silicon carbon nitride films prepared by vapor transport-chemical vapor deposition

Y. Awad, My Alı El Khakani, Mihai Scarlete et al. · Journal of Applied Physics · 2010 · 33 citations

Engineering, Spectral Deconvolution, Chemistry +19

Silicon Nitride and Silicon Carbonitride by the Pyrolysis of Poly(methylsiladiazane)

Jiliang He, Mihai Scarlete, John F. Harrod · Journal of the American Ceramic Society · 1995 · 25 citations

Materials Science, Ceramic Yields, Chemical Engineering +15

Infrared spectroscopic study of thin films of poly(methylsilane), its oxidation, and its transformation into poly(carbosilane) on the surfaces of silicon single-crystal wafers

Mihai Scarlete, Stephane Brienne, Ian S. Butler et al. · Chemistry of Materials · 1994 · 24 citations

Engineering, Altmetric Attention Score, Thin Film Process Technology +17

Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition

T. Fanaei, N. Camiré, Ç. Aktik et al. · Thin Solid Films · 2007 · 16 citations

Materials Science, Electrical Engineering, Engineering +7