Concepedia

Chuei Fu Chue

CF

Statistics

Publications

1

Citations

19

H-Index

1

Active since

2009

Affiliations

Nanya Technology (Taiwan)(Current)

Chuei Fu Chue is an author at Nanya Technology (Taiwan).

Publications per year

2009–2009

1

Publications

1

Using intrafield high-order correction to achieve overlay requirement beyond sub-40nm node

Chun Huang, Chuei Fu Chue, An-Hsiung Liu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 19 citations

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