Kie Jin Park

Atomic Layer Deposition of Conformal Inorganic Nanoscale Coatings on Three-Dimensional Natural Fiber Systems:  Effect of Surface Topology on Film Growth Characteristics

G. Kevin Hyde, Kie Jin Park, S. Michael Stewart et al. · Langmuir · 2007 · 114 citations

Natural Sciences, Materials Engineering, Materials Science +17

In Situ Auger Electron Spectroscopy Study of Atomic Layer Deposition:  Growth Initiation and Interface Formation Reactions during Ruthenium ALD on Si−H, SiO₂, and HfO₂ Surfaces

Kie Jin Park, David B. Terry, S. Michael Stewart et al. · Langmuir · 2007 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +17

Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide

Qing Peng, Daisuke Hojo, Kie Jin Park et al. · Thin Solid Films · 2007 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +10

Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates

Kie Jin Park, Gregory N. Parsons · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 15 citations

Natural Sciences, Materials Engineering, Materials Science +17