Concepedia

Robert E. Hutchins

RE

1

Publications

21

Citations

1

H-Index

2001

Active since

Affiliations

Digital Optics Technologies (United States)(Current)

Robert E. Hutchins is an author at Digital Optics Technologies (United States) specializing in integrated circuits, optoelectronics, and optical devices.

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Publications per year

2001–2001

1

Publications

1

Design and fabrication of customized illumination patterns for low-k1 lithography: a diffractive approach

Marc D. Himel, Robert E. Hutchins, Jamey C. Colvin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations

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