Concepedia

Monica M. C. Allain

MM

Statistics

Publications

4

Citations

47

H-Index

4

Active since

1999

Affiliations

University of Illinois Urbana-Champaign(Current)

Intel (United States)

University of Wisconsin–Madison

Argonne National Laboratory

Monica M. C. Allain is an author at University of Illinois Urbana-Champaign specializing in natural sciences, surface science, and physics.

Publications per year

1999–2005

4

Publications

4

Influences on ionization fraction in an inductively coupled ionized physical vapor deposition device plasma

D. R. Juliano, D. N. Ruzic, Monica M. C. Allain et al. · Journal of Applied Physics · 2002 · 14 citations

, , +16

Erosion and degradation of EUV lithography collector mirrors under particle bombardment

Jean Paul Allain, A. Hassanein, M. Nieto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 13 citations

, , +16

Xe+-irradiation effects on multilayer thin-film optical surfaces in EUV lithography

Jean Paul Allain, A. Hassanein, Monica M. C. Allain et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2005 · 10 citations

, , +16

The effect of lithium wall conditioning in TFTR on plasma–surface interactions

D. N. Ruzic, Monica M. C. Allain, R. Budny · Journal of Nuclear Materials · 1999 · 10 citations

, , +12

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