Takeshi Kitajima

Two-dimensional periodic alignment of self-assembled Ge islands on patterned Si(001) surfaces

Takeshi Kitajima, Bing Liu, Stephen R. Leone · Applied Physics Letters · 2002 · 77 citations

Engineering, Si Mesa, Self-assembled Ge Islands +17

Two-dimensional CT images of two-frequency capacitively coupled plasma

Takeshi Kitajima, Yukari H. Takeo, Toshiaki Makabe · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 74 citations · Full text

Computed Tomography, Engineering, Two-dimensional Ct Images +23

Effects of frequency on the two-dimensional structure of capacitively coupled plasma in Ar

Takeshi Kitajima, Yukari H. Takeo, Nobuhiko Nakano et al. · Journal of Applied Physics · 1998 · 60 citations

Engineering, High Frequency, Rf Electrode +16

Increased O(D1) metastable density in highly Ar-diluted oxygen plasmas

Takeshi Kitajima, Toshiki Nakano, Toshiaki Makabe · Applied Physics Letters · 2006 · 51 citations

Engineering, Plasma Physics, Vacuum Device +16

Negative charge injection to a positively charged SiO2 hole exposed to plasma etching in a pulsed two-frequency capacitively coupled plasma in CF4/Ar

Takeshi Ohmori, Takeshi Goto, Takeshi Kitajima et al. · Applied Physics Letters · 2003 · 37 citations

Engineering, Plasma Physics, Sio2 Hole +19