Jun-ichiro Kitta

Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope

Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa et al. · Measurement Science and Technology · 2003 · 49 citations

Engineering, Materials Engineering, Materials Science +17

Novel CD-SEM calibration reference patterned by EB cell projection lithography

Yoshinori Nakayama, Satoshi Gonda, Ichiko Misumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 16 citations

Engineering, Manufacturing Engineering, Metrology +16

25 nm pitch comparison between a traceable x-ray diffractometer and a metrological atomic force microscope

Ichiko Misumi, Jun-ichiro Kitta, Hiroyuki Fujimoto et al. · Measurement Science and Technology · 2011 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Round-robin measurements of 100- and 60-nm scales among a deep-ultraviolet laser diffractometer, a scanning electron microscope and various atomic force microscopes

Ichiko Misumi, Satoshi Gonda, Osamu Satô et al. · Measurement Science and Technology · 2007 · 13 citations

Natural Sciences, Materials Science, Instrumentation +15