1b:I[76749,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 1c:I[3486,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 1d:I[41892,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 1e:I[17707,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 1f:I[66528,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 20:I[63176,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 21:I[87099,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 22:I[26200,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"Group"] 23:I[23365,["/_next/static/chunks/0383663887945ae7.js","/_next/static/chunks/df7e62179e4ae938.js","/_next/static/chunks/acf71181277ecf85.js","/_next/static/chunks/63561dcd578bd4db.js","/_next/static/chunks/5bf36002c846d2d8.js","/_next/static/chunks/b24fef6e58c9b2f5.js","/_next/static/chunks/ea1fda2cc52e974e.js"],"default"] 24:T4e3,Amorphous indium zinc oxide (IZO) thin films were deposited at different temperatures, by atomic layer deposition (ALD) using [1,1,1-trimethyl-N-(trimethylsilyl)silanaminato]indium (INCA-1) as the indium precursor, diethlzinc (DEZ) as the zinc precursor, and hydrogen peroxide (H₂O₂) as the reactant. The ALD process of IZO deposition was carried by repeated supercycles, including one cycle of indium oxide (In₂O₃) and one cycle of zinc oxide (ZnO). The IZO growth rate deviates from the sum of the respective In₂O₃ and ZnO growth rates at ALD growth temperatures of 150, 175, and 200 °C. We propose growth temperature-dependent surface reactions during the In₂O₃ cycle that correspond with the growth-rate results. Thin-film transistors (TFTs) were fabricated with the ALD-grown IZO thin films as the active layer. The amorphous IZO TFTs exhibited high mobility of 42.1 cm² V^-1 s^-1 and good positive bias temperature stress stability. Finally, flexible IZO TFT was successfully fabricated on a polyimide substrate without performance degradat

Hwan-Jae Lee

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