Concepedia
1
Publications
14
Citations
H-Index
1983
Active since
Affiliations
Canon Anelva (Japan)(Current)
Isamu MORISAKO is an author at Canon Anelva (Japan) specializing in instrumentation, applied physics, and gas detection.
Top concepts
EngineeringGas DetectionApplied PhysicsInstrumentationElectrical Engineering
Publications per year
1983–1983
Trace gas detection in high purity gases for semiconductor fabrication with a new GC/MS system
Isamu MORISAKO, Takemi Kato, Yoichi INO et al. · International Journal of Mass Spectrometry and Ion Physics · 1983 · 14 citations
Electrical Engineering, Engineering, Trace Gas Detection +7
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