Concepedia

Mahsa Konh

MK

6

Publications

148

Citations

6

H-Index

2018

Active since

Affiliations

University of Delaware(Current)

University of California, Riverside

Mahsa Konh is an author at University of Delaware specializing in materials science, engineering, and surface science.

Top concepts

EngineeringMaterial ScienceSurface ScienceChemistryCorrosionThin FilmsApplied PhysicsSurface ChemistryMaterials EngineeringCatalysis

Publications per year

2018–2021

6

Publications

6

Molecular mechanisms of atomic layer etching of cobalt with sequential exposure to molecular chlorine and diketones

Mahsa Konh, Chuan He, Xi Lin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 57 citations · Full text

Surface chemistry of thermal dry etching of cobalt thin films using hexafluoroacetylacetone (hfacH)

Jing Zhao, Mahsa Konh, Andrew V. Teplyakov · Applied Surface Science · 2018 · 30 citations

Materials Science, Surface Characterization, Engineering +9

Molecular Mechanism of Thermal Dry Etching of Iron in a Two-Step Atomic Layer Etching Process: Chlorination Followed by Exposure to Acetylacetone

Mahsa Konh, Anderson Janotti, Andrew V. Teplyakov · The Journal of Physical Chemistry C · 2021 · 19 citations

Engineering, Chemistry, Thermal Dry Etching +16

Thermal Chemistry of Metal Organic Compounds Adsorbed on Oxide Surfaces

Bo Chen, Xiangdong Qin, Clinton Lien et al. · Organometallics · 2019 · 17 citations

Materials Science, Inorganic Chemistry, Metal Organic Compounds +13

Gas-Phase Electron-Impact Activation of Atomic Layer Deposition (ALD) Precursors: MeCpPtMe<sub>3</sub>

Clinton Lien, Mahsa Konh, Bo Chen et al. · The Journal of Physical Chemistry Letters · 2018 · 13 citations

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