Concepedia

C. Marcoux

CM

Statistics

Publications

10

Citations

616

H-Index

10

Active since

2008

Affiliations

CEA Grenoble(Current)

Commissariat à l'Énergie Atomique et aux Énergies Alternatives

Laboratoire d'Électronique des Technologies de l'Information

Institut polytechnique de Grenoble

Université Grenoble Alpes

C. Marcoux is an author at CEA Grenoble specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationMicroelectronicsElectrical EngineeringPhysicsInstrumentationNanoelectronicsMaterial ScienceSensor Technology

Publications per year

2008–2012

10

Publications

10

Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

R. B. Karabalin, Matthew H. Matheny, Philip X.‐L. Feng et al. · Applied Physics Letters · 2009 · 181 citations

Materials Science, Optical Materials, Engineering +14

Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications

Igor Bargatin, E. B. Myers, J. S. Aldridge et al. · Nano Letters · 2012 · 144 citations · Full text

Engineering, Gas Sensor, Large-scale Integration +17

Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

Arnaud Walther, C. Marcoux, B. Desloges et al. · Journal of Magnetism and Magnetic Materials · 2008 · 100 citations · Full text

Materials Science, Magnetism, Engineering +10

Piezoresistance of top-down suspended Si nanowires

Alexandra Koumela, Denis Mercier, C. Dupré et al. · Nanotechnology · 2011 · 55 citations

Silicon nanowire based Pirani sensor for vacuum measurements

T. Brun, Denis Mercier, Alexandra Koumela et al. · Applied Physics Letters · 2012 · 42 citations

Vacuum Sensor, Electrical Engineering, Nano-pirani Vacuum Gauges +14

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