C. Marcoux

Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films

R. B. Karabalin, Matthew H. Matheny, Philip X.‐L. Feng et al. · Applied Physics Letters · 2009 · 184 citations

Engineering, Materials Engineering, Materials Science +17

Large-Scale Integration of Nanoelectromechanical Systems for Gas Sensing Applications

Igor Bargatin, E. B. Myers, J. S. Aldridge et al. · Nano Letters · 2012 · 147 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Micro-patterning of NdFeB and SmCo magnet films for integration into micro-electro-mechanical-systems

Arnaud Walther, C. Marcoux, B. Desloges et al. · Journal of Magnetism and Magnetic Materials · 2008 · 100 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Piezoresistance of top-down suspended Si nanowires

Alexandra Koumela, Denis Mercier, C. Dupré et al. · Nanotechnology · 2011 · 57 citations

Natural Sciences, Electrical Engineering, Materials Science +15

Silicon nanowire based Pirani sensor for vacuum measurements

T. Brun, Denis Mercier, Alexandra Koumela et al. · Applied Physics Letters · 2012 · 42 citations

Engineering, Electrical Engineering, Materials Science +17