Concepedia
Statistics
Publications
3
Citations
66
H-Index
Active since
2020
Affiliations
TU Wien(Current)
Xaver Klemenschits is an author at TU Wien specializing in device simulation, semiconductor devices, and etching processes.
Publications per year
2020–2023
Effect of Mask Geometry Variation on Plasma Etching Profiles
Josip Bobinac, Tobias Reiter, Julius Piso et al. · Micromachines · 2023 · 26 citations · Full text
Engineering, Electrical Engineering, Materials Engineering +17
The Level-Set Method for Multi-Material Wet Etching and Non-Planar Selective Epitaxy
Alexander Toifl, Michael Quell, Xaver Klemenschits et al. · IEEE Access · 2020 · 20 citations · Full text
Engineering, Materials Engineering, Materials Science +14
Impact of plasma induced damage on the fabrication of 3D NAND flash memory
Tobias Reiter, Xaver Klemenschits, Lado Filipovic · Solid-State Electronics · 2022 · 20 citations · Full text
Engineering, Computer Engineering, Materials Science +16
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