Concepedia

Matthieu Benz

MB

2

Publications

82

Citations

2

H-Index

2014

Active since

Affiliations

Science et Ingénierie des Matériaux et Procédés(Current)

Université Grenoble Alpes

Institut polytechnique de Grenoble

Laboratoire des Matériaux et du Génie Physique

Centre National de la Recherche Scientifique

Matthieu Benz is an author at Science et Ingénierie des Matériaux et Procédés specializing in thin films, applied physics, and surface science.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMaterials Engineering

Publications per year

2014–2018

2

Publications

2

Niobium nitride thin films deposited by high temperature chemical vapor deposition

F. Mercier, Stéphane Coindeau, S. Lay et al. · Surface and Coatings Technology · 2014 · 46 citations

Materials Science, Materials Engineering, Engineering +7

Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition

Liang Tian, Simon Ponton, Matthieu Benz et al. · Surface and Coatings Technology · 2018 · 36 citations

Materials Science, Aluminium Nitride, Engineering +7

Rows per page

1–2 of 2