Statistics
Publications
1
Citations
29
H-Index
1
Active since
2004
Affiliations
Motorola (United States)(Current)
J. Fung Chen is an author at Motorola (United States) specializing in optimal location modeling, binary mask design, and mask fabrication.
Publications per year
2004–2004
1
1
Contact hole reticle optimization by using interference mapping lithography (IML)
Robert Socha, Douglas J. Van Den Broeke, Stephen Hsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 29 citations
Engineering, Manufacturing Engineering, Biomedical Optics +13
1–1 of 1