Concepedia

Kwang Soo Hyun

KS

Statistics

Publications

4

Citations

254

H-Index

4

Active since

2002

Affiliations

Seoul National University(Current)

Samsung (South Korea)

Kwang Soo Hyun is an author at Seoul National University specializing in semiconductor thin films, materials engineering, and materials science.

Publications per year

2002–2003

4

Publications

4

Chemical interaction between atomic-layer-deposited HfO2 thin films and the Si substrate

Moonju Cho, Jaehoo Park, Hong Bae Park et al. · Applied Physics Letters · 2002 · 114 citations

, , +17

Thermal annealing effects on the structural and electrical properties of HfO2/Al2O3 gate dielectric stacks grown by atomic layer deposition on Si substrates

Moonju Cho, Hong Bae Park, Jaehoo Park et al. · Journal of Applied Physics · 2003 · 90 citations

, , +17

Thermal stability of atomic-layer-deposited HfO2 thin films on the SiNx-passivated Si substrate

Moonju Cho, Jaehoo Park, Hong Bae Park et al. · Applied Physics Letters · 2002 · 28 citations

, , +17

Improvement in electrical insulating properties of 10-nm-thick Al2O3 film grown on Al/TiN/Si substrate by remote plasma annealing at low temperatures

Ji-Hoon Kim, Jaewon Song, Ohsung Kwon et al. · Applied Physics Letters · 2002 · 22 citations

, , +17

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