Concepedia

Tomomi Yamanobe

TY

Statistics

Publications

6

Citations

82

H-Index

6

Active since

1994

Affiliations

Oki Electric Industry (Japan)(Current)

Tohoku University

Tomomi Yamanobe is an author at Oki Electric Industry (Japan) specializing in materials engineering, etching, and materials science.

Publications per year

1994–2000

6

Publications

6

Dry Etching Technique for Subquarter‐Micron Copper Interconnects

Yasushi Igarashi, Tomomi Yamanobe, Toshio Ito · Journal of The Electrochemical Society · 1995 · 20 citations

, , +17

Thermal stability of copper interconnects fabricated by dry-etching process

Yasushi Igarashi, Tomomi Yamanobe, Toshio Ito · Thin Solid Films · 1995 · 15 citations

, , +16

Metallic bismuth on strontium-bismuth tantalate thin films for ferroelectric memory application

Katsuhiko Asami, Tetsuya Ōsaka, Tomomi Yamanobe et al. · Surface and Interface Analysis · 2000 · 14 citations

, , +17

Thermal Stability of Interconnect of TiN/Cu/TiN Multilayered Structure

Yasushi Igarashi, Tomomi Yamanobe, Tetsuo Yamaji et al. · Japanese Journal of Applied Physics · 1994 · 12 citations

, , +17

Effects of Ion Etching and Annealing in O<sub>2</sub> Atmosphere Following Ion Etching on Properties and Chemistry of Sr<sub>0.9</sub>Bi<sub>2.1</sub>Ta<sub>2</sub>O<sub>9+a</sub> Thin Films

Katsuhiko Asami, Ichiro Koiwa, Tomomi Yamanobe · Japanese Journal of Applied Physics · 1999 · 11 citations

, , +17

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