Concepedia

Taegun Park

TP

6

Publications

99

Citations

6

H-Index

2019

Active since

Affiliations

Yonsei University(Current)

Taegun Park is an author at Yonsei University specializing in engineering, materials science, and nanoelectronics.

ORCID

Top concepts

Publications per year

2019–2023

6

Publications

6

Oxide regrowth mechanism during silicon nitride etching in vertical 3D NAND structures

Taehyeon Kim, Changjin Son, Taegun Park et al. · Microelectronic Engineering · 2019 · 26 citations

, , +11

Understanding of Si3N4-H3PO4 reaction chemistry for the control of Si3N4 dissolution kinetics

Taegun Park, Changjin Son, Taehyeon Kim et al. · Journal of Industrial and Engineering Chemistry · 2021 · 22 citations

, , +9

Improvement of Si3N4/SiO2 etching selectivity through the passivation of SiO2 surface in aromatic carboxylic acid-added H3PO4 solutions for the 3D NAND integration

Taehyeon Kim, Taegun Park, Sangwoo Lim · Applied Surface Science · 2023 · 15 citations

Bioactivity of Fermented Green Coffee Bean Extract Containing High Chlorogenic Acid and Surfactin

Boyong Kim, Dong Sook Lee, Hyeong Seok Kim et al. · Journal of Medicinal Food · 2019 · 13 citations

Improvement of SiO2 surface morphology during the selective Si3N4 etching in the multi-layered 3D NAND Si3N4/SiO2 stack structures by the generation of CO2 gas through the control of redox reaction

Taehyeon Kim, Taegun Park, Changjin Son et al. · Surfaces and Interfaces · 2022 · 12 citations

Rows per page

1–5 of 6