Concepedia

Shoumian Chen

SC

10

Publications

275

Citations

10

H-Index

2001

Active since

Affiliations

Shanghai Medical Information Center(Current)

Shanghai Huali Microelectronics (China)

Fudan University

ShanghaiTech University

State Key Laboratory of ASIC and System

Shoumian Chen is an author at Shanghai Medical Information Center specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsDevice ModelingChemical EngineeringElectrical EngineeringPhysicsChemistryCryogenics

Publications per year

2001–2023

10

Publications

10

Characterization of Carbon-Doped SiO[sub 2] Low k Thin Films: Preparation by Plasma-Enhanced Chemical Vapor Deposition from Tetramethylsilane

Licheng M. Han, Jisheng Pan, Shoumian Chen et al. · Journal of The Electrochemical Society · 2001 · 98 citations

Engineering, Thin Film Process Technology, Chemistry +16

Air‐Stable and Self‐Driven Perovskite Photodiodes with High On/Off Ratio and Swift Photoresponse

Yajie Yan, Qingqing Wu, Yuhang Zhao et al. · Small · 2018 · 44 citations

Effect of thickness scaling on the permeability and thermal stability of Ta(N) diffusion barrier

Haoyu Xu, Zhengjun Hu, Xin-Ping Qu et al. · Applied Surface Science · 2019 · 27 citations

Materials Science, Engineering, Diffusion Resistance +8

Cu CMP process development and characterization of Cu dishing with 1.8 <i>μ</i>m Cu pad and 3.6 <i>μ</i>m pitch in Cu/SiO<sub>2</sub> hybrid bonding

Zhengjun Hu, Xin-Ping Qu, Hong Lin et al. · Japanese Journal of Applied Physics · 2019 · 24 citations

Materials Science, Materials Engineering, Chemical Engineering +10

Cryogenic CMOS RF Device Modeling for Scalable Quantum Computer Design

Zhidong Tang, Zewei Wang, Ao Guo et al. · IEEE Journal of the Electron Devices Society · 2022 · 21 citations · Full text

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