Thomas Lautenschläger

Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition

Carsten Bundesmann, Thomas Lautenschläger, D. Spemann et al. · Applied Surface Science · 2016 · 41 citations

Materials Science, Materials Engineering, Engineering +9

Energy Distribution of Secondary Particles in Ion Beam Deposition Process of Ag: Experiment, Calculation and Simulation

Carsten Bundesmann, René Feder, Thomas Lautenschläger et al. · Contributions to Plasma Physics · 2015 · 25 citations

Ion Implantation, Engineering, Physics +10

Ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles

Thomas Lautenschläger, René Feder, H. Neumann et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2016 · 25 citations

Materials Science, Ion Implantation, Engineering +10

Systematic investigation of the reactive ion beam sputter deposition process of SiO2

Maria Mateev, Thomas Lautenschläger, D. Spemann et al. · The European Physical Journal B · 2018 · 22 citations

Materials Science, Ion Implantation, Engineering +7

Reactive ion beam sputtering of Ti: Influence of process parameters on angular and energy distribution of sputtered and backscattered particles

Thomas Lautenschläger, Carsten Bundesmann · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 18 citations

Materials Science, Ion Implantation, Engineering +15