Concepedia
Statistics
Publications
13
Citations
453
H-Index
11
Active since
1997
Affiliations
Sandia National Laboratories(Current)
Sandia National Laboratories California
University of Houston
T. W. Hamilton is an author at Sandia National Laboratories specializing in physics, plasma physics, and natural sciences.
Publications per year
1997–2006
Absolute intensities of the vacuum ultraviolet spectra in oxide etch plasma processing discharges
J. R. Woodworth, M. E. Riley, V. A. Amatucci et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 81 citations
Natural Sciences, Electrical Engineering, Physics +13
Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine
J. R. Woodworth, M. E. Riley, Paul Miller et al. · Journal of Applied Physics · 1997 · 63 citations
Natural Sciences, Physics, Electrochemistry +10
Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge
J. R. Woodworth, Matthew G. Blain, Robert Jarecki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 58 citations · Full text
Natural Sciences, Physics, Optics +11
Ion energy distributions at rf-biased wafer surfaces
J. R. Woodworth, I. C. Abraham, M. E. Riley et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 55 citations
Natural Sciences, Electrical Engineering, Physics +10
Ion distribution functions in inductively coupled radio frequency discharges in argon–chlorine mixtures
J. R. Woodworth, M. E. Riley, Paul Miller et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 41 citations
Natural Sciences, Electrical Engineering, Physics +11
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