Concepedia

Mario Grau

MG

3

Publications

96

Citations

3

H-Index

2013

Active since

Affiliations

RheinMain University of Applied Sciences(Current)

University of Freiburg

Mario Grau is an author at RheinMain University of Applied Sciences specializing in instrumentation, microfabrication, and engineering.

Top concepts

EngineeringInstrumentationMicrofabricationSensorsEducationMeasurementSensor DesignMicroelectronicsSensor TechnologyBiomedical Sensors

Publications per year

2013–2016

3

Publications

3

Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and high vacuum regime

F. Völklein, Mario Grau, Andreas Meier et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 42 citations

Engineering, Measurement, Mechanical Engineering +17

Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and rough vacuum regimes

Mario Grau, F. Völklein, Andreas Meier et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 38 citations

Engineering, Measurement, Mechanical Engineering +19

Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structure

Mario Grau, F. Völklein, Andreas Meier et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2016 · 16 citations

Mems Sensors, Engineering, Gas Sensor +24

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