Concepedia

Petra Amirfeiz

PA

Statistics

Publications

4

Citations

234

H-Index

4

Active since

2000

Affiliations

Chalmers University of Technology(Current)

Petra Amirfeiz is an author at Chalmers University of Technology specializing in materials science, engineering, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceMicroelectronicsElectronic PackagingInterfacial PhenomenaMaterials EngineeringChemistryNanoelectronics

Publications per year

2000–2003

4

Publications

4

Formation of Silicon Structures by Plasma-Activated Wafer Bonding

Petra Amirfeiz, Stefan Bengtsson, Mats Bergh et al. · Journal of The Electrochemical Society · 2000 · 96 citations

Engineering, Argon Plasma Treatment, Chemistry +18

Plasma assisted room temperature bonding for MST

Andreas Weinert, Petra Amirfeiz, Stefan Bengtsson · Sensors and Actuators A Physical · 2001 · 56 citations

Materials Science, Room Temperature, Engineering +4

Room Temperature Wafer Bonding Using Oxygen Plasma Treatment in Reactive Ion Etchers With and Without Inductively Coupled Plasma

Anke Sanz‐Velasco, Petra Amirfeiz, Stefan Bengtsson et al. · Journal of The Electrochemical Society · 2003 · 49 citations

Engineering, Silicon On Insulator, Plasma Processing +17

Room temperature wafer bonding of silicon, oxidized silicon, and crystalline quartz

Stefan Bengtsson, Petra Amirfeiz · Journal of Electronic Materials · 2000 · 33 citations

Materials Science, Wafer Scale Processing, Engineering +7

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