Concepedia

Holger Saare

HS

3

Publications

127

Citations

3

H-Index

2019

Active since

Affiliations

North Carolina State University(Current)

Holger Saare is an author at North Carolina State University specializing in thin films, chemistry, and surface chemistry.

ORCID

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Publications per year

2019–2022

3

Publications

3

Integrated Isothermal Atomic Layer Deposition/Atomic Layer Etching Supercycles for Area-Selective Deposition of TiO<sub>2</sub>

Seung Keun Song, Holger Saare, Gregory N. Parsons · Chemistry of Materials · 2019 · 84 citations

Comparative <i>In Situ</i> Study of the Initial Growth Trends of Atomic Layer-Deposited Al<sub>2</sub>O<sub>3</sub> Films

Holger Saare, Golnaz Dianat, Gregory N. Parsons · The Journal of Physical Chemistry C · 2022 · 22 citations

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Effect of reactant dosing on selectivity during area-selective deposition of TiO2 via integrated atomic layer deposition and atomic layer etching

Holger Saare, Seung Keun Song, Jung‐Sik Kim et al. · Journal of Applied Physics · 2020 · 21 citations

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