W. Kölker

Metal versus rare-gas ion irradiation during Ti1−<i>x</i>Al<i>x</i>N film growth by hybrid high power pulsed magnetron/dc magnetron co-sputtering using synchronized pulsed substrate bias

Grzegorz Greczyński, Jun Lu, Jens Jensen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 119 citations · Full text

Engineering, Thin Film Process Technology, Ion Implantation +20

Strain-free, single-phase metastable Ti0.38Al0.62N alloys with high hardness: metal-ion energy vs. momentum effects during film growth by hybrid high-power pulsed/dc magnetron cosputtering

Grzegorz Greczyński, Jun Lu, Jens Jensen et al. · Thin Solid Films · 2014 · 80 citations

Materials Engineering, Materials Science, Engineering +8

Novel strategy for low-temperature, high-rate growth of dense, hard, and stress-free refractory ceramic thin films

Grzegorz Greczyński, Jun Lu, S. Bolz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2014 · 65 citations · Full text

Dcms Mode, Engineering, Dcms Tin Films +18

Low-temperature growth of dense and hard Ti0.41Al0.51Ta0.08N films via hybrid HIPIMS/DC magnetron co-sputtering with synchronized metal-ion irradiation

Hanna Fager, Olof Tengstrand, Jun Lu et al. · Journal of Applied Physics · 2017 · 35 citations · Full text

Engineering, Low-temperature Growth, Ta-hipims Films +17

The states of order and the phase diagram of , investigated by neutron scattering

K. Hilfrich, W. Kölker, W. Petry et al. · Acta Metallurgica et Materialia · 1994 · 27 citations

Engineering, Physics, Phase Equilibrium +5