Concepedia

Joon Han Kim

JH

2

Publications

36

Citations

2

H-Index

1997

Active since

Affiliations

University of Minnesota(Current)

Joon Han Kim is an author at University of Minnesota specializing in electrical engineering, piezoelectric materials, and microelectronics.

Top concepts

EngineeringMaterial ScienceMicroelectronicsElectrical EngineeringPiezoelectric MaterialsThin FilmsMicrofluidicsMicrostructureSemiconductorsApplied Physics

Publications per year

1997–1998

2

Publications

2

Fabrication process of pzt piezoelectric cantilever unimorphs using surface micromachining

Joon Han Kim, Lei Wang, Shayne Zurn et al. · Integrated ferroelectrics · 1997 · 26 citations

Engineering, Mechanical Engineering, Surface Micromachining +16

Characteristics of Pb(Zr<sub>0.53</sub>Ti<sub>0.47</sub>)O<sub>3</sub> Films Deposited by Metalorganic Decomposition on Pt/Ti/TiO<sub>2</sub>/polysilicon/Si<sub>3</sub>N<sub>4</sub>/Si for Pizoelectric Microelectromechanical System Devices

Joon Han Kim, Young Soo Yoon, Dennis L. Polla · Japanese Journal of Applied Physics · 1998 · 10 citations

Engineering, Piezoelectric Coefficient, Thin Film Process Technology +17

Rows per page

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