Concepedia

E. Estragnat

EE

2

Publications

75

Citations

2

H-Index

2001

Active since

Affiliations

University of Alaska Fairbanks(Current)

E. Estragnat is an author at University of Alaska Fairbanks specializing in water treatment, material processing, and environmental engineering.

Top concepts

EngineeringMicrostructureSurface ScienceWater TreatmentMaterial ScienceMicrofabricationSurface PolishingMaterial ProcessingMechanical EngineeringEnvironmental Engineering

Publications per year

2001–2004

2

Publications

2

Experimental investigation on mechanisms of silicon chemical mechanical polishing

E. Estragnat, Guang Ping Tang, Hong Liang et al. · Journal of Electronic Materials · 2004 · 65 citations

Materials Science, Engineering, Experimental Investigation +8

Mechanisms of Post-CMP Cleaning

Hong Liang, E. Estragnat, J. Lee · MRS Proceedings · 2001 · 10 citations

Decontamination, Environmental Engineering, Water Treatment +2

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