Statistics
Publications
1
Citations
13
H-Index
1
Active since
1989
Siegfried Scheler is an author specializing in absorptivity, digital imaging, and process parameters.
Publications per year
1989–1989
1
1
Image Reversal Resist for g-line Exposure: Chemistry and Lithographic Evaluation
Gerhard Buhr, Helmut Lenz, Siegfried Scheler · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 13 citations
Natural Sciences, Chemical Engineering, Materials Engineering +12
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