Concepedia

Ian Haehnlein

IH

Statistics

Publications

3

Citations

149

H-Index

3

Active since

2015

Affiliations

University of Illinois Urbana-Champaign(Current)

Ian Haehnlein is an author at University of Illinois Urbana-Champaign specializing in applied physics, engineering, and microelectronics.

Top concepts

Publications per year

2015–2022

3

Publications

3

Cu films prepared by bipolar pulsed high power impulse magnetron sputtering

Baohua Wu, Ian Haehnlein, Ivan Shchelkanov et al. · Vacuum · 2018 · 105 citations

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High Deposition Rate Symmetric Magnet Pack for High Power Pulsed Magnetron Sputtering

Priya Raman, Ivan Shchelkanov, J. McLain et al. · Surface and Coatings Technology · 2015 · 28 citations

, , +5

Time-resolved electron energy distribution functions at the substrate during a HiPIMS discharge with cathode voltage reversal

Wolfgang Huber, Thomas Houlahan, Zachary Jeckell et al. · Plasma Sources Science and Technology · 2022 · 16 citations

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