Concepedia

Zhenzi Chen

ZC

1

Publications

14

Citations

1

H-Index

2019

Active since

Affiliations

Beneq (Finland)(Current)

Zhenzi Chen is an author at Beneq (Finland) specializing in thin films, surface science, and high temperature materials.

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Publications per year

2019–2019

1

Publications

1

Batch processing of aluminum nitride by atomic layer deposition from AlCl3 and NH3

Zhenzi Chen, Zhen Zhu, Kari Härkönen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2019 · 14 citations

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