Statistics
Publications
1
Citations
10
H-Index
1
Active since
1998
Affiliations
University of California, Berkeley(Current)
Y. Lee is an author at University of California, Berkeley specializing in microelectronics, microscopy, and optoelectronics.
Publications per year
1998–1998
1
1
Multicusp sources for ion beam projection lithography
Y. Lee, Richard Gough, W. B. Kunkel et al. · Review of Scientific Instruments · 1998 · 10 citations
Multicusp Source Chamber, Electrical Engineering, Engineering +14
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