Concepedia

S.‐L. Zhang

SZ

2

Publications

44

Citations

2

H-Index

1997

Active since

Affiliations

KTH Royal Institute of Technology(Current)

S.‐L. Zhang is an author at KTH Royal Institute of Technology specializing in thin films, surface science, and applied physics.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceCrystalline DefectsChemistrySemiconductorsElectronic DevicesElectronic Materials

Publications per year

1997–1997

2

Publications

2

Boron‐Doped Polycrystalline Si x Ge1 − x Films: Dopant Activation and Solid Solubility

P.‐E. Hellberg, A. Gagnor, S.‐L. Zhang et al. · Journal of The Electrochemical Society · 1997 · 31 citations

Materials Science, Semiconductors, Solubility Study +13

Characterization of In Situ Phosphorus‐Doped Polycrystalline Silicon Films Grown by Disilane‐Based Low‐Pressure Chemical Vapor Deposition

Jan Grahn, J. Pejnefors, Mcm Richard van de Sanden et al. · Journal of The Electrochemical Society · 1997 · 13 citations

Engineering, Disilane Films, Semiconductor Materials +16

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