Benoît Baudrillart

Synthesis of graphene by cobalt-catalyzed decomposition of methane in plasma-enhanced CVD: Optimization of experimental parameters with Taguchi method

Hasan-Al Mehedi, Benoît Baudrillart, Damien Alloyeau et al. · Journal of Applied Physics · 2016 · 31 citations · Full text

Materials Science, Graphene Nanomeshes, Chemical Engineering +15

Nanocrystalline diamond films grown at very low substrate temperature using a distributed antenna array microwave process: Towards polymeric substrate coating

Benoît Baudrillart, Fabien Bénédic, Th. Chauveau et al. · Diamond and Related Materials · 2017 · 24 citations

Materials Science, Diamond-like Carbon, Electrical Engineering +12

Microstructure and growth kinetics of nanocrystalline diamond films deposited in large area/low temperature distributed antenna array microwave‐plasma reactor

Benoît Baudrillart, Fabien Bénédic, Ovidiu Brinza et al. · physica status solidi (a) · 2015 · 19 citations

Materials Science, Diamond-like Carbon, Engineering +13

Low‐temperature deposition of nanocrystalline diamond films on silicon nitride substrates using distributed antenna array PECVD system

Benoît Baudrillart, Fabien Bénédic, Amel S. Melouani et al. · physica status solidi (a) · 2016 · 16 citations

Engineering, Thin Film Process Technology, Si 3 +16

Spectroscopic study of low pressure, low temperature H₂–CH₄–CO₂microwave plasmas used for large area deposition of nanocrystalline diamond films. Part I: on temperature determination and energetic aspects

A S C Nave, Benoît Baudrillart, S. Hamann et al. · Plasma Sources Science and Technology · 2016 · 16 citations

Engineering, Absorption Spectroscopy, Plasma Physics +23