Concepedia

Manfred Rahe

MR

Statistics

Publications

3

Citations

35

H-Index

3

Active since

1991

Affiliations

Lambda Science (United States)(Current)

Manfred Rahe is an author at Lambda Science (United States) specializing in materials science, materials engineering, and photonics.

Publications per year

1991–2001

3

Publications

3

<title>Compact Z-pinch EUV source for photolithography</title>

Guido Schriever, Manfred Rahe, Uwe Stamm et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 14 citations

, , +12

New aspects of micromachining and microlithography using 157-nm excimer laser radiation

Michael Fiebig, Michael Kauf, John H. Fair et al. · Applied Physics A · 1999 · 11 citations

, , +14

<title>Absorption calorimetry and laser-induced damage threshold measurements of antireflective-coated ZnSe and metal mirrors at 10.6 μm</title>

Manfred Rahe, Erik Oertel, L. Reinhardt et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 10 citations

, , +17

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