Concepedia

P. Vauvert

PV

2

Publications

95

Citations

2

H-Index

1998

Active since

Affiliations

National Centre of Scientific Research "Demokritos"(Current)

Institut des Matériaux Jean Rouxel

P. Vauvert is an author at National Centre of Scientific Research "Demokritos" specializing in microfabrication, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicrofabricationPlasma PhysicsPlasma SimulationSurface TechnologyMaterials Engineering

Publications per year

1998–2000

2

Publications

2

Etching of SiO2 and Si in fluorocarbon plasmas: A detailed surface model accounting for etching and deposition

Εvangelos Gogolides, P. Vauvert, George Kokkoris et al. · Journal of Applied Physics · 2000 · 84 citations

Materials Science, Materials Engineering, Surface Technology +13

Complete plasma physics, plasma chemistry, and surface chemistry simulation of SiO2 and Si etching in CF4 plasmas

P. Vauvert, A. Rhallabi, G. Turban · Microelectronic Engineering · 1998 · 11 citations

Materials Science, Engineering, Microfabrication +10

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