Statistics
Publications
1
Citations
15
H-Index
1
Active since
1993
Affiliations
Panasonic (Japan)(Current)
Akihiro Kanaboshi is an author at Panasonic (Japan) specializing in microstructure, wafer bonding, and engineering.
Publications per year
1993–1993
1
1
Direct bonding of quartz crystal onto silicon
Kazuo Eda, Akihiro Kanaboshi, Tetsuyoshi Ogura et al. · Journal of Applied Physics · 1993 · 15 citations
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