Concepedia

Sung-Duck Ahn

SA

Statistics

Publications

2

Citations

56

H-Index

2

Active since

1994

Affiliations

Samsung (South Korea)(Current)

Sung-Duck Ahn is an author at Samsung (South Korea) specializing in materials science, plasma-enhanced chemical vapor deposition, and chemical vapor deposition.

Publications per year

1994–1995

2

Publications

2

Microstructure and Electrical Properties of Tantalum Oxide Thin Film Prepared by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition

Il Kim, Sung-Duck Ahn, Bok-Won Cho et al. · Japanese Journal of Applied Physics · 1994 · 44 citations

, , +17

Effects of deposition temperature on the electrical properties of electron cyclotron resonance plasma-enhanced chemical vapor deposition Ta<sub>2</sub>O<sub>5</sub> film and the formation of interfacial SiO<sub>2</sub>

Il Kim, Jongseok Kim, Bok-Won Cho et al. · Journal of materials research/Pratt's guide to venture capital sources · 1995 · 12 citations

, , +14

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