J.M. van der Schuur

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Active since

1985

Affiliations

Thermal Wave Imaging (United States)(Current)

J.M. van der Schuur is an author at Thermal Wave Imaging (United States) specializing in semiconductor devices, ion implantation effects, and engineering.

Publications per year

1985–1987

Publications

Ultra-High-Resolution Dose Uniformity Monitoring With Thermal Waves

William L. Smith, Michael W. Taylor, J.M. van der Schuur · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1985 · 14 citations

Engineering, Electrical Engineering, Microelectronics +11

Relaxation of ion implant damage in silicon wafers at room temperature measured by thermal waves and double implant sheet resistance

J.M. van der Schuur, C M Waters, Jim Maneval et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 13 citations

Engineering, Materials Engineering, Materials Science +16

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