J. Ligot

Stress analysis of polycrystalline thin films and surface regions by X-ray diffraction

U. Welzel, J. Ligot, P. Lamparter et al. · Journal of Applied Crystallography · 2005 · 586 citations · Full text

Engineering, Mechanical Engineering, Residual Stress +23

X-ray diffraction study of residual stresses and microstructure in tungsten thin films sputter deposited on polyimide

P. Villain, P. Goudeau, J. Ligot et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 31 citations

Engineering, Mechanical Engineering, Tungsten Thin Films +17

Characterization and modeling of electrical resistivity of sputtered tungsten films

J. Ligot, Stéphane Benayoun, J.J. Hantzpergue · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 19 citations

Engineering, Thin Film Process Technology, Vacuum Device +17

Sputtered tungsten films on polyimide, an application for X-ray masks

J. Ligot, Stéphane Benayoun, J.J. Hantzpergue et al. · Solid-State Electronics · 1999 · 17 citations

Materials Science, Materials Engineering, X-ray Spectroscopy +8

Analysis of cracking induced by scratching of tungsten coatings on polyimide substrate

J. Ligot, Stéphane Benayoun, J.J. Hantzpergue · Wear · 2000 · 14 citations

Materials Engineering, Materials Science, Engineering +9