Concepedia

Chengliang Di

CD

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Publications

2

Citations

22

H-Index

2

Active since

2014

Affiliations

Chinese Academy of Sciences(Current)

Institute of Optics and Electronics, Chinese Academy of Sciences

University of Chinese Academy of Sciences

Chengliang Di is an author at Chinese Academy of Sciences specializing in projection lithography, focal length, and optoelectronics.

Publications per year

2014–2014

2

Publications

2

Interferometric Scheme for High-Sensitivity Coaxial Focusing in Projection Lithography

Chengliang Di, Song Hu, Wei Yan et al. · IEEE photonics journal · 2014 · 11 citations · Full text

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Moiré-Based Absolute Interferometry With Large Measurement Range in Wafer-Mask Alignment

Chengliang Di, Wei Yan, Song Hu et al. · IEEE Photonics Technology Letters · 2014 · 11 citations

, , +13

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