Yuko Tsutsui Ito

Swelling and dissolution kinetics of poly(4-hydroxystyrene) in tetrabutylammonium hydroxide (TBAH) aqueous solutions studied by quartz crystal microbalance (QCM) method—in comparison with tetramethylammonium hydroxide (TMAH) aqueous solutions

Yuko Tsutsui Ito, Hitomi Betsumiya, Takahiro Kozawa et al. · Japanese Journal of Applied Physics · 2022 · 28 citations

Engineering, Ultrafine Patterning, Chemistry +16

Dissolution dynamics of partially protected poly(4-hydroxystyrene) in tetraalkylammonium hydroxide aqueous solution

Hitomi Betsumiya, Yuko Tsutsui Ito, Takahiro Kozawa et al. · Japanese Journal of Applied Physics · 2023 · 22 citations · Full text

Materials Science, Materials Engineering, Chemical Engineering +13

Relationship between surface free energy and development process (swelling and dissolution kinetics) of poly(4-hydroxystyrene) film in water and 2.38 wt% tetramethylammonium hydroxide aqueous solution

Yuko Tsutsui Ito, Takahiro Kozawa · Japanese Journal of Applied Physics · 2021 · 18 citations

Materials Science, Surface Free Energy, Chemical Engineering +14

Effects of photoacid generator decomposition on dissolution kinetics of poly(4-hydroxystyrene) in tetraalkylammonium hydroxide aqueous solutions

Yutaro Iwashige, Yuko Tsutsui Ito, Takahiro Kozawa et al. · Japanese Journal of Applied Physics · 2023 · 13 citations · Full text

Engineering, Chemistry, Resist Materials +17

Classification of dissolution modes of partially protected poly(4-hydroxystyrene) in tetraalkylammonium hydroxide aqueous solutions

Hitomi Betsumiya, Yuqing Jin, Yuko Tsutsui Ito et al. · Japanese Journal of Applied Physics · 2023 · 12 citations · Full text