Ingolf Weingaertner

Sub-nm topography measurement by deflectometry: flatness standard and wafer nanotopography

Ralf D. Geckeler, Ingolf Weingaertner · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 57 citations

Engineering, Materials Science, Metrology +16

<title>Novel scanning technique for ultraprecise measurement of topography</title>

Ingolf Weingaertner, Michael Schulz, Clemens Elster · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 43 citations

Engineering, Civil Engineering, Metrology +16

Use and treaceable calibration of autocollimators for ultra-precise measurement of slope and topography

Ralf D. Geckeler, Ingolf Weingaertner, A. Just et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 32 citations

Engineering, Civil Engineering, Instrumentation +13

Novel scanning technique for ultraprecise measurement of slope and topography of flats, aspheres, and complex surfaces

Ingolf Weingaertner, Michael Schulz · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 13 citations

Engineering, Civil Engineering, Geodesy +14