Yoko Maemura is an author at Nagasaki University specializing in engineering, physics, and applied physics.
Top concepts
PhysicsEngineeringApplied PhysicsAtomic PhysicsPlasma PhysicsSurface ScienceTransport PhenomenaNon-axisymmetric Plasma Configurations
Publications per year
1996–1999
3
3
Particle formation and a-Si:H film deposition in narrow-gap RF plasma CVD
Yoko Maemura, Hiroshi Fujiyama, Tomoko Takagi et al. · Thin Solid Films · 1999 · 17 citations
Mechanism of particle transport in magnetized silane plasmas
SC Yang, Y Nakajima, Yoko Maemura et al. · Plasma Sources Science and Technology · 1996 · 17 citations · Full text
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