Concepedia

Goru Kang

GK

4

Publications

57

Citations

4

H-Index

2016

Active since

Affiliations

Korea University of Science and Technology(Current)

Korea Research Institute of Standards and Science

Hanyang University

Goru Kang is an author at Korea University of Science and Technology specializing in engineering, chemistry, and materials science.

Top concepts

Publications per year

2016–2020

4

Publications

4

The Effects of Thermal Decomposition of Tetrakis-ethylmethylaminohafnium (TEMAHf) Precursors on HfO<sub>2</sub>Film Growth using Atomic Layer Deposition

Nam Khen Oh, Jintae Kim, Jong-Ki Ahn et al. · Applied Science and Convergence Technology · 2016 · 22 citations · Full text

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ZrO2 film prepared by atomic layer deposition using less viscous cocktail CpZr[N(CH3)2]3/C7H8 precursor and ozone

Jong-Ki An, Jin‐Tae Kim, Goru Kang et al. · Journal of Alloys and Compounds · 2017 · 13 citations

, , +6

Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

Jong-Ki An, Eunmi Choi, Seob Shim et al. · Nanoscale Research Letters · 2020 · 12 citations · Full text

Oxidant effect of La(NO3)3·6H2O solution on the crystalline characteristics of nanocrystalline ZrO2 films grown by atomic layer deposition

Nam Khen Oh, Jin‐Tae Kim, Goru Kang et al. · Applied Surface Science · 2016 · 10 citations

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