Concepedia

Stan Stokowski

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Publications

2

Citations

66

H-Index

2

Active since

1998

Affiliations

KLA (United States)(Current)

Stan Stokowski is an author at KLA (United States) specializing in defect inspection, defect detection, and materials science.

Publications per year

1998–2010

2

Publications

2

Wafer inspection technology challenges for ULSI manufacturing

Stan Stokowski, M. Vaez‐Iravani · 1998 · 50 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +14

Inspecting EUV mask blanks with a 193nm system

Stan Stokowski, Joshua Glasser, Gregg Inderhees et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17

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